Voltage-current characteristics of high-current glow discharges

被引:27
作者
Takaki, K [1 ]
Taguchi, D [1 ]
Fujiwara, T [1 ]
机构
[1] Iwate Univ, Dept Elect & Elect Engn, Morioka, Iwate 0208551, Japan
关键词
D O I
10.1063/1.1369612
中图分类号
O59 [应用物理学];
学科分类号
摘要
The voltage-current characteristics of glow discharges in gas mixture (N-2:O-2=8:2) at a pressure of 10 Torr were obtained with the discharge current up to 150 A. Parallel-plane electrodes with a diameter of 10.7 cm and a discharge chamber with co-axial geometry were used to produce glow discharge with high current. The glow discharge voltage was almost constant until the whole surface of the cathode was covered with glow, i.e., until the discharge current became 3.7 A in our experimental condition (a normal glow discharge mode). The voltage, however, increased with the current when the glow covered over the cathode (an abnormal glow discharge mode). The electron density in positive column of the high-current glow discharge was obtained to be 3x10(11) cm(-3) from Langmuir probe measurements. (C) 2001 American Institute of Physics.
引用
收藏
页码:2646 / 2648
页数:3
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