Flexible microdischarge arrays: Metal/polymer devices

被引：45

作者：

Park, SJ ^{[1
]}

Wagner, CJ ^{[1
]}

Herring, CM ^{[1
]}

Eden, JG ^{[1
]}

机构：

[1] Univ Illinois, Dept Elect & Comp Engn, Lab Opt Phys & Engn, Urbana, IL 61801 USA

来源：

APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 02期

关键词：

D O I：

10.1063/1.126923

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Flexible microdischarge arrays have been fabricated in metal-polymer-metal structures having a total thickness of similar to 30 mu m (similar to 1.2 mils). Composed of individual cylindrical devices having a diameter of 150 mu m, positive differential resistance (30-120 k Ohm), and operating voltages as low as 114 V for a 5 mu m thick dielectric layer, the arrays operate at pressures beyond 700 Torr of Ne and in 1 atm of air. For Ne pressures less than or equal to 200 Torr, emission is produced from Ne ion excited states lying more than 55 eV above the neutral ground state (2p(6)). The structures reported here are inexpensive to fabricate and have lifetimes beyond 50 h. Arrays that have been sealed by conventional lamination have also been operated successfully. (C) 2000 American Institute of Physics. [S0003-6951(00)02728-5].

引用

页码：199 / 201

页数：3

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