Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs

被引：12

作者：

Jerominek, H ^{[1
]}

Pope, TD ^{[1
]}

Alain, C ^{[1
]}

Zhang, R ^{[1
]}

Picard, F ^{[1
]}

Lehoux, M ^{[1
]}

Cayer, F ^{[1
]}

Savard, S ^{[1
]}

Larouche, C ^{[1
]}

Grenier, C ^{[1
]}

机构：

[1] INO, St Foy, PQ G1P 4S4, Canada

来源：

INFRARED DETECTORS AND FOCAL PLANE ARRAYS VI | 2000年 / 4028卷

关键词：

uncooled; infrared; bolometer; vanadium dioxide;

D O I：

10.1117/12.391766

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Prototypes of VO2-based bolometric detectors with lateral dimensions of 25x25, 30x30, 35x35, 40x40 and finally 50x50 mum(2) and fill factors approaching 90% are presented. These detectors are grouped in hardwired linear arrays as large as 512 x1 pixels. Under DC biasing, the fabricated detectors, even the smallest ones, exhibit responsivities from 48 000 to 120 000 VW-1, detectivities in the range of 1.5 x 10(8) cm Hz(1/2) W-1 and response times in the range of 5 ms. These new bolometric detector structures contain hidden-legs placed completely underneath the bolometer platform. Results of simulations of the mechanical, optical and electrical properties of these new detector structures are presented. A complete detector fabrication process flow is described.

引用

页码：47 / 56

页数：10

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