Low operation voltage of inkjet-printed plastic sheet-type micromechanical switches

被引：32

作者：

Nakano, Shintaro ^{[1
]}

Sekitani, Tsuyoshi ^{[1
]}

Yokota, Tomoyuki ^{[1
]}

Someyaa, Takao ^{[1
]}

机构：

[1] Univ Tokyo, Sch Engn, Quantum Phase Elect Ctr, Bunkyo Ku, Tokyo 1138656, Japan

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 05期

基金：

日本科学技术振兴机构;

关键词：

D O I：

10.1063/1.2840378

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have fabricated plastic micromechanical switches using inkjet printing technologies. By reducing the device dimensions, particularly the spacing between the electrodes for electrostatic attraction, the operation voltage is reduced to 6.6 V. The frequency response exceeds 1 kHz when the operation voltage is above 20 V. When the number of periodic cycles of the rectangular voltage waveforms that are applied to the control electrodes in air exceeds 2x10(6), the on resistance changes slightly from 25 to 30 Omega, thereby demonstrating the reliability and stability of the present plastic switches. (c) 2008 American Institute of Physics.

引用

页数：3

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