Electric field sensor using electrostatic force deflection of a micro-spring supported membrane

被引:28
作者
Roncin, A
Shafai, C
Swatek, DR
机构
[1] Univ Manitoba, Dept Elect & Comp Engn, Winnipeg, MB R3T 5V6, Canada
[2] Manitoba Hydro, Insulat Engn & Testing Dept, Winnipeg, MB, Canada
关键词
electrostatic field meter; membrane; electrostatic voltmeter; MEMS; micromachining;
D O I
10.1016/j.sna.2005.02.018
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An electric field sensor is shown which uses a micromachined micro-spring supported membrane as the sensing element. The sensing mechanism involves electrostatic force to deflect the membrane, and an optical position sensor to measure membrane movement. Measurement resolution was 5 kV/m for a dc field and 140 V/m for a 49 Hz ac field. It is shown that a bias voltage applied to the membrane can be used to increase measurement sensitivity. With a 17 kV/m dc bias field, a 0.3 V/m ac field at 97 Hz was detectable. (C) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:179 / 184
页数:6
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