Electric field sensor using electrostatic force deflection of a micro-spring supported membrane

被引：28

作者：

Roncin, A

Shafai, C

Swatek, DR

机构：

[1] Univ Manitoba, Dept Elect & Comp Engn, Winnipeg, MB R3T 5V6, Canada

[2] Manitoba Hydro, Insulat Engn & Testing Dept, Winnipeg, MB, Canada

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 123-24卷

关键词：

electrostatic field meter; membrane; electrostatic voltmeter; MEMS; micromachining;

D O I：

10.1016/j.sna.2005.02.018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An electric field sensor is shown which uses a micromachined micro-spring supported membrane as the sensing element. The sensing mechanism involves electrostatic force to deflect the membrane, and an optical position sensor to measure membrane movement. Measurement resolution was 5 kV/m for a dc field and 140 V/m for a 49 Hz ac field. It is shown that a bias voltage applied to the membrane can be used to increase measurement sensitivity. With a 17 kV/m dc bias field, a 0.3 V/m ac field at 97 Hz was detectable. (C) 2005 Elsevier B.V. All rights reserved.

引用

页码：179 / 184

页数：6

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