Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems

被引:23
作者
Hansen, TM
Stokbro, K
Hansen, O
Hassenkam, T
Shiraki, I
Hasegawa, S
Boggild, P
机构
[1] Tech Univ Denmark, Mikroelekt Centret, DK-2800 Lyngby, Denmark
[2] Univ Copenhagen, Dept Chem, DK-2100 Copenhagen E, Denmark
[3] AIST Tsukuba, Tsukuba, Ibaraki 3058562, Japan
[4] Univ Tokyo, Sch Sci, Dept Phys, Bunkyo Ku, Tokyo 1130033, Japan
关键词
D O I
10.1063/1.1589161
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A method to improve the resolution of four-point-probe measurements of two-dimensional (2D) and quasi-2D systems is presented. By mapping the conductance on a dense grid around a target area and postprocessing the data, the resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing. The real conductance sheet is simulated by a grid of discrete resistances, which is optimized by means of a standard optimization algorithm, until the simulated voltage-to-current ratios converges with the measurement. The method has been tested against simulated data as well as real measurements and is found to successfully deconvolute the four-point-probe measurements. In conjunction with a newly developed scanning four-point probe with electrode spacing of 1.1 mum, the method can resolve the conductivity with submicron resolution. (C) 2003 American Institute of Physics.
引用
收藏
页码:3701 / 3708
页数:8
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