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Direct measurement of surface-state conductance by microscopic four-point probe method

被引：52
作者：
Hasegawa, S
Shiraki, I
Tanikawa, T
Petersen, CL
Hansen, TM
Boggild, P
Grey, F
机构：
[1] Univ Tokyo, Dept Phys, Bunkyo Ku, Tokyo 1130033, Japan
[2] Capres AS, DK-2800 Lyngby, Denmark
[3] Tech Univ Denmark, Mikroelektron Ctr 3, DK-2800 Lyngby, Denmark
来源：
JOURNAL OF PHYSICS-CONDENSED MATTER | 2002年 / 14卷 / 35期
关键词：
D O I：
10.1088/0953-8984/14/35/309
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
For in situ measurements of local electrical conductivity of well defined crystal surfaces in ultrahigh vacuum, we have developed microscopic four-point probes with a probe spacing of several micrometres, installed in a scanning-electron - microscope/electron-diffraction chamber. The probe is precisely positioned on targeted areas of the sample surface by using piezoactuators. This apparatus enables conductivity measurement with extremely high surface sensitivity, resulting in direct access to surface-state conductivity of the surface superstructures, and clarifying the influence of atomic steps upon conductivity.
引用
收藏
页码：8379 / 8392
页数：14
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