Time resolved analysis of ion motion in an oscillating plasma sheath

The ion extraction mechanism based on the self-biasing effect resulting from an RF voltage between a low pressure plasma and an electrode in contact with the plasma is studied using detailed computer simulations. The results from the simulations are compared with corresponding measurements. In particular, the influence of the frequency of the RF extraction voltage and the ion mass on the energy distribution of the extracted ion flux are investigated. The simulation of the ion kinetics in the oscillating plasma sheath in front of the electrode is shown to provide a detailed understanding of the respective ion acceleration mechanism. The simulation results supply useful information for the selection of favorable operation conditions, e.g. for establishing a uniform energy of the extracted plasma ions. Copyright (C) 1996 Elsevier Science Ltd.