Evolution and future trends of SIMOX material

被引：27

作者：

Krause, S ^{[1
]}

Anc, M ^{[1
]}

Roitman, P ^{[1
]}

机构：

[1] Arizona State Univ, Dept Chem Bio & Mat Engn, Mat Engn Program, Tempe, AZ 85287 USA

来源：

MRS BULLETIN | 1998年 / 23卷 / 12期

关键词：

D O I：

10.1557/S0883769400029791

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：25 / 29

页数：5

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