Controlled fabrication of patterned lateral porous alumina membranes

被引：16

作者：

Gowtham, M. ^{[1
]}

Eude, L. ^{[1
]}

Cojocaru, C. S. ^{[1
]}

Marquardt, B. ^{[1
]}

Jeong, H. J. ^{[1
]}

Legagneux, P. ^{[2
]}

Song, K. K. ^{[3
]}

Pribat, D. ^{[1
]}

机构：

[1] Ecole Polytech, Phys Interfaces & Couches Minces Lab, F-91128 Palaiseau, France

[2] Thales Res & Technol, F-91128 Palaiseau, France

[3] Samsung Elect, Yongin 446711, Gyenoggi Do, South Korea

来源：

NANOTECHNOLOGY | 2008年 / 19卷 / 03期

关键词：

D O I：

10.1088/0957-4484/19/03/035303

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Confined lateral alumina templates are fabricated with different pore sizes by changing the acid electrolyte and the anodization voltage. The control of the number of pore rows down to one dimension is also achieved, by controlling the thickness of the starting aluminum film as well as the anodization voltage. We observe that the mechanism of pore formation in the lateral regime is very similar to that in the classical vertical situation.

引用

页数：6

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