Gradient and alternating diameter nanopore templates by focused ion beam guided anodization

被引：13

作者：

Chen, Bo ^{[1
]}

Lu, Kathy ^{[1
]}

Tian, Zhipeng ^{[1
]}

机构：

[1] Virginia Polytech Inst & State Univ, Dept Mat Sci & Engn, Blacksburg, VA 24061 USA

来源：

ELECTROCHIMICA ACTA | 2010年 / 56卷 / 01期

基金：

美国国家科学基金会;

关键词：

Gradient diameter; Alternating diameter; Focused ion beam lithography; Anodization; Patterning; ANODIC POROUS ALUMINA; HEXAGONAL PORE ARRAYS; NANOWIRE NANOSENSORS; PATTERNED ALUMINUM; NANOCHANNEL ARRAYS; SILICON NANOWIRES; SELF-ORGANIZATION; SULFURIC-ACID; OXIDE; GROWTH;

D O I：

10.1016/j.electacta.2010.08.057

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Ordered arrays of anodic alumina nanopores with uniform pore diameters have been fabricated by self-organized anodization of aluminum. However, gradient or alternating diameter nanopore arrays with designed interpore distances have not been possible. In this study, focused ion beam lithography is used to fabricate hexagonally arranged concaves with different diameters in designed arrangements on aluminum surfaces. The patterns are then used to guide the further growth of alumina nanopores in the subsequent oxalic acid anodization. Gradient and alternating nanopore arrangements have been attained by FIB patterning guided oxalic acid anodization. The fundamental understanding of the process is discussed. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：435 / 440

页数：6

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