Transmission ion channeling analysis of isolated 60° misfit dislocations -: art. no. 211907

被引:4
作者
Breese, MBH
Huang, L
Teo, EJ
King, PJC
Wilshaw, PR
机构
[1] Natl Univ Singapore, Ctr Ion Beam Applicat, Dept Phys, Singapore 117542, Singapore
[2] Rutherford Appleton Lab, Didcot OX11 0QX, Oxon, England
[3] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
关键词
D O I
10.1063/1.2135393
中图分类号
O59 [应用物理学];
学科分类号
摘要
High-contrast transmission channeling images and linescans of isolated bunches and individual 60 degrees misfit dislocations in thick partially relaxed Si1-xGex/Si layers are presented. Changes in dislocation contrast with tilt angle are explained using a model of planar dechanneling by the two-edge components of 60 degrees dislocations. By careful analysis of the tilting contrast, all of the four possible combinations of the two-edge components of the Burger's vector of 60 degrees dislocations may be distinguished. (c) 2005 American Institute of Physics.
引用
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页码:1 / 3
页数:3
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