Field emission from metal-containing amorphous carbon composite films

被引:17
作者
Lau, SP [1 ]
Li, YJ [1 ]
Tay, BK [1 ]
Sun, Z [1 ]
Chen, GY [1 ]
Chen, JS [1 ]
Ding, XZ [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
关键词
amorphous carbon composite; field emission; filtered cathodic vacuum arc;
D O I
10.1016/S0925-9635(01)00403-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Metal-containing (Co, Al and Ti) amorphous carbon composite films (a-C:Me) have been prepared by the filtered cathodic are technique using metal-containing graphite targets at room temperature. Field emission properties of the heat-treated a-C:Me films were improved and were found to be dependent on the metal content and variety of metals. After heat-treatment at 550 degreesC in a mixture of acetylene and nitrogen gases, the field emission properties of a-C:Co films were significantly improved, in which Co acted as catalysts to enhance graphitization as well as formation of carbon nanotubes during heat-treatment. A threshold electric field of less than 2 V/mum was obtained from the heat-treated a-C:Co composite films without conditioning. The heat-treated a-C:Al and a-C:Ti films, though the conditioning step could be avoided and relatively low threshold fields could be obtained, exhibited relatively low emission site densities, however. The a-C:Me films, which can be deposited with a high rate at room temperature and require a relatively low temperature, heat-treatment process to enhance electron emission, are promising for practical applications in field emission display. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1727 / 1731
页数:5
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