Enhancement of magnetic properties by nitrogen implantation to Mn-implanted p-type GaN

被引:32
作者
Baik, JM [1 ]
Shon, Y
Kang, TW
Lee, JL
机构
[1] Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang 790784, South Korea
[2] Dongguk Univ, Quantum Funct Semicond Res Ctr, Seoul 100715, South Korea
关键词
D O I
10.1063/1.1647282
中图分类号
O59 [应用物理学];
学科分类号
摘要
N and Mn ions were co-implanted into p-type GaN and subsequently annealed at 700-900degreesC. Compared with Mn-implanted sample, the (Mn+N)-implanted sample revealed a larger ferromagnetic signal. This was attributed to the increase of Ga-Mn magnetic phases. Mn-N compounds, such as Mn6N2.58 and Mn3N2, decreased and the resistivity significantly increased, meaning a reduction of N vacancies. It is suggested that enhancement in ferromagnetic properties in the (Mn+N)-implanted GaN originated from the reduction of N vacancies and the increase of Ga-Mn magnetic phases. (C) 2004 American Institute of Physics.
引用
收藏
页码:1120 / 1122
页数:3
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