Angle dependent X-ray photoemission study on UV-ozone treatments of indium tin oxide

被引：71

作者：

Song, WJ

So, SK

Wang, DY

Qiu, Y

Cao, LL ^{[1
]}

机构：

[1] Tsinghua Univ, Dept Chem, Beijing 100084, Peoples R China

[2] Hong Kong Baptist Univ, Dept Phys, Hong Kong, Hong Kong, Peoples R China

[3] ULVAC PHI Inc, Chigasaki, Kanagawa 2530084, Japan

来源：

APPLIED SURFACE SCIENCE | 2001年 / 177卷 / 03期

基金：

中国国家自然科学基金;

关键词：

angle dependent X-ray photoelectron spectroscopy; indium tin oxide; UV-ozone treatment;

D O I：

10.1016/S0169-4332(01)00178-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The surface chemistry of ITO thin-films before and after UV-ozone treatment was characterized using angle dependent Xray photoelectron spectroscopy (ADXPS). After solvent cleaning, the ITO surface was covered with a thin nonconducting carbon contamination layer of similar to7 Angstrom. This contamination layer was removed efficiently by UV-ozone treatment, and the chemical states of the residual carbon at ITO surface after UV-ozone treatment were quite different from contaminated carbon. UV-ozone treatment modified ITO surface by introducing O2- ions into ITO surface. The modified depth was about 50 Angstrom. The modification decreased the carrier concentration at ITO surface, and thus decreased the conductivity of ITO surface. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：158 / 164

页数：7

共 18 条

[1] AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF THE VALENCE BAND-STRUCTURE OF INDIUM OXIDES [J].