Hybrid-assembled micro dosing system using silicon-based micropump/valve and mass flow sensor

被引：46

作者：

Nguyen, NT ^{[1
]}

Schubert, S ^{[1
]}

Richter, S ^{[1
]}

Dotzel, W ^{[1
]}

机构：

[1] Tech Univ Chemnitz, Dept Elect Engn & Informat Technol, D-09107 Chemnitz, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 69卷 / 01期

关键词：

silicon micropump; silicon mass flow sensor; micro dosing system;

D O I：

10.1016/S0924-4247(98)00039-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a hybrid-assembled bidirectional micro dosing system for a water flow range of - 40 mu l/min to 80 mu l/min. The system consists of a silicon micropump/valve chip (9 mm x 9 mm), a silicon flow sensor (6 mm x 12 mm) and a piezoelectric as well as an electrostatic actuator. The technology of each component and the hybrid assembly of the whole system are described. Results of numerical simulation of the micropump/valve and the mass flow sensor are presented and compared with experimental results. The new pulse-width-modulated control method for the actuator makes controlling the system easier. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：85 / 91

页数：7

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