Lithography-free, self-aligned inkjet printing with sub-hundred-nanometer resolution

被引：258

作者：

Sele, CW

von Werne, T

Friend, RH

Sirringhaus, H

机构：

[1] Univ Cambridge, Cavendish Lab, Cambridge CB03 0HE, England

[2] Plast Log Ltd, Cambridge CB4 0FX, England

来源：

ADVANCED MATERIALS | 2005年 / 17卷 / 08期

关键词：

D O I：

10.1002/adma.200401285

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Direct inkjet printing of sub-100 nm nanoscale gaps, without the need for any high-resolution lithography, is made possible by a novel self-aligned printing method (see Figure). The benefits of this method are demonstrated by fabrication of all-polymer transistor circuits, which exhibit switching speeds at least two orders of magnitude higher than those previously reported for inkjet-printed polymer devices.

引用

收藏

页码：997 / +

页数：6

相关论文

共 25 条

[1] Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography [J].

Austin, MD ;

Chou, SY .

APPLIED PHYSICS LETTERS, 2002, 81 (23) :4431-4433

[2] Pentacene-based radio-frequency identification circuitry [J].

Baude, PF ;

Ender, DA ;

Haase, MA ;

Kelley, TW ;

Muyres, DV ;

Theiss, SD .

APPLIED PHYSICS LETTERS, 2003, 82 (22) :3964-3966

[3] MOTIONS OF DROPLETS ON SOLID-SURFACES INDUCED BY CHEMICAL OR THERMAL-GRADIENTS [J].

BROCHARD, F .

LANGMUIR, 1989, 5 (02) :432-438

[4] Noncontact potentiometry of polymer field-effect transistors [J].

Bürgi, L ;

Sirringhaus, H ;

Friend, RH .

APPLIED PHYSICS LETTERS, 2002, 80 (16) :2913-2915

[5] High-stability ultrathin spin-on benzocyclobutene gate dielectric for polymer field-effect transistors [J].

Chua, LL ;

Ho, PKH ;

Sirringhaus, H ;

Friend, RH .

APPLIED PHYSICS LETTERS, 2004, 84 (17) :3400-3402

[6] A simplified method for predicting the dynamic surface tension of concentrated surfactant solutions [J].

Daniel, RC ;

Berg, JC .

JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2003, 260 (01) :244-249

[7] Inkjet printing of polymers: State of the art and future developments [J].

de Gans, BJ ;

Duineveld, PC ;

Schubert, US .

ADVANCED MATERIALS, 2004, 16 (03) :203-213

[8] PLASMA-ETCHING OF ORGANIC MATERIALS .1. POLYIMIDE IN O2-CF4 [J].

EGITTO, FD ;

EMMI, F ;

HORWATH, RS ;

VUKANOVIC, V .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03) :893-904

[9] Fast polymer integrated circuits [J].

Fix, W ;

Ullmann, A ;

Ficker, J ;

Clemens, W .

APPLIED PHYSICS LETTERS, 2002, 81 (09) :1735-1737

[10] The path to ubiquitous and low-cost organic electronic appliances on plastic [J].

Forrest, SR .

NATURE, 2004, 428 (6986) :911-918