A gas sensor array using carbon nanotubes and microfabrication technology

被引：50

作者：

Li, J ^{[1
]}

Lu, YJ ^{[1
]}

Ye, Q ^{[1
]}

Delzeit, L ^{[1
]}

Meyyappan, M ^{[1
]}

机构：

[1] NASA, Ames Res Ctr, Ctr Nanotechnol, Moffett Field, CA 94035 USA

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 2005年 / 8卷 / 11期

关键词：

D O I：

10.1149/1.2063289

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

A nanosensor technology has been developed using single-walled carbon nanotubes (SWNTs) combined with silicon-based microfabrication processes. A sensor array containing twelve interdigitated electrode (IDE) pairs with different gap sizes has been designed. The IDE fingers were fabricated using photolithography and thin-film metallization techniques. SWNTs were grown directly on the IDEs for trace amounts of gas detection. This sensor array has been exposed to nitrogen dioxide at various concentrations from 10 ppm to 400 ppb, and ammonia from 50 to 5 ppm. The results show a very reproducible sensor performance from one sensor to the other in the array. (c) 2005 The Electrochemical Society.

引用

页码：H100 / H102

页数：3