Influence of different post-treatments on the structure and optical properties of zinc oxide thin films

被引：220

作者：

Hong, RJ ^{[1
]}

Huang, JB ^{[1
]}

He, HB ^{[1
]}

Fan, ZX ^{[1
]}

Shao, JD ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Res & Dev Ctr Opt Thin Film Coatings, Shanghai 201800, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2005年 / 242卷 / 3-4期

关键词：

zinc oxide; thin films; annealing; ion beam bombardment;

D O I：

10.1016/j.apsusc.2004.08.037

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 [物理化学]; 081704 [应用化学];

摘要：

Zinc oxide (ZnO) films with c-oriented were grown on fused quartz glass substrates at room temperature using dc reactive magnetron sputtering. The as-grown films were annealed at 700 degrees C in air and bombarded by ion beam, respectively. The effects of post-treatments on the structural and optical properties of the ZnO films were investigated by X-ray diffraction (XRD), photoluminescence (PL), optical transmittance and absorption measurements. The XRD spectra indicate that the crystal quality of ZnO films has been improved by both the post-treatments. Compared with the as-grown sample, both annealed and bombarded samples exhibited blueshift in the UV emission peaks, and a strong green emission was found in the annealed ZnO film. In both optical transmittance and absorption spectra, a blueshift of the band-gap edge was observed in the bombarded film, while a redshift was observed in the annealed film. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：346 / 352

页数：7

共 25 条

[1]

Pulsed laser deposition of ZnO thin films for applications of light emission [J].