Evolution of the texture of TiN films prepared by filtered arc deposition

被引：20

作者：

Zhao, JP

Wang, X

Shi, TS

Liu, XH

机构：

[1] Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences

来源：

JOURNAL OF APPLIED PHYSICS | 1996年 / 79卷 / 12期

关键词：

D O I：

10.1063/1.362576

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Three kinds of textures, i.e., (200), (111), and (220) of TiN films prepared by filtered are deposition have been continuously observed with varying film thickness and bombarding energy of the deposited particles. The evolution of the texture from (200) to (111), then to (220) is discussed on the basis of the so-called overall energy which consists of the surface energy, the strain energy, and the stopping energy of the films. (C) 1996 American Institute of Physics.

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页码：9399 / 9401

页数：3

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