Detection of nitrogen in CVD diamond

被引：27

作者：

Bergmaier, A ^{[1
]}

Dollinger, G ^{[1
]}

Faestermann, T ^{[1
]}

Frey, CM ^{[1
]}

Ferguson, M ^{[1
]}

Guttler, H ^{[1
]}

Schulz, G ^{[1
]}

Willerscheid, H ^{[1
]}

机构：

[1] DAIMLER BENZ AG,FORSCH & TECH,D-89013 ULM,GERMANY

来源：

关键词：

CVD diamond; ERD; nitrogen content; morphology;

D O I：

10.1016/0925-9635(95)00345-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A series of CVD diamond films was analysed for their nitrogen content by high resolution elastic recoil detection (ERD) in order to investigate the incorporation of nitrogen from the gas phase in a CVD reactor into the growing diamond film. CVD diamond films were deposited from a mixture of 1.5% CH4 in H-2 and an admixture of nitrogen gas varying from 0.33% up to 67% [N]/[C]. The measurements revealed that the probability of nitrogen incorporation is only about 0.4% with respect to carbon. In addition, the morphology and texture of the polycrystalline films were investigated by scanning electron microscopy and X-ray texture analysis and showed a significant dependence on the nitrogen admixture.

引用

页码：995 / 997

页数：3

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