Volume growth initiated by point-to-point ultraviolet-laser direct writing in hybrid solgel glass for three-dimensional microfabrication

被引：2

作者：

Yu, WX ^{[1
]}

Yuan, XC ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

OPTICS LETTERS | 2003年 / 28卷 / 17期

关键词：

D O I：

10.1364/OL.28.001573

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Volume-growth solgel glass acting as self-developing material is used for three-dimensional (3D) fabrication of micro-optical elements. The solgel glass is exposed to a focused laser beam (lambda = 325 nm), and surface corrugation is created as a result of surface expansion in the exposed area. The profile depth is related to the laser beam intensity, which is controlled by an acousto-optic modulator, which makes it possible to fabricate 3D structures in the material. Preliminary results show that the controllable volume-growth effect will be of considerable use for production of 3D micro-optical elements with excellent surface smoothness in solgel materials. (C) 2003 Optical Society of America.

引用

页码：1573 / 1575

页数：3

共 13 条

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