Characterization of SiC using synchrotron white beam X-ray topography

被引：34

作者：

Dudley, M ^{[1
]}

Huang, XR ^{[1
]}

机构：

[1] SUNY Stony Brook, Dept Mat Sci & Engn, Stony Brook, NY 11794 USA

来源：

SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2 | 2000年 / 338-3卷

关键词：

defects; micropipe; screw dislocation; synchrotron topography;

D O I：

10.4028/www.scientific.net/MSF.338-342.431

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A short review of recent synchrotron white beam X-ray topography (SWBXT) studies of defects in 4H and 6H SiC is presented. Defects observed include closed-core and hollow-core screw dislocations (micropipes) in 6H and 4H, deformation induced basal plane dislocations in 6H and 4H, and small angle boundaries in 4H. These studies include the analysis of the relationship between hollow-core diameter and the Burgers vector for micropipes using SWBXT and scanning electron microscopy (SEM), the principles of a set of SWBXT techniques and associated simulations for characterizing micropipes and closed-core screw dislocations, and the nucleation mechanism of micropipes obtained using SWBXT in combination with other techniques.

引用

页码：431 / 436

页数：6

共 14 条

[1] FORMATION OF CRYSTALS IN SOLUTIONS [J].

CHERNOV, AA .

CONTEMPORARY PHYSICS, 1989, 30 (04) :251-276

[2] Quantitative analysis of screw dislocations in 6H-SiC single crystals [J].

Dudley, M ;

Si, W ;

Wang, S ;

Carter, C ;

Glass, R ;

Tsvetkov, V .

NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1997, 19 (2-4) :153-164

[3] WHITE-BEAM SYNCHROTRON TOPOGRAPHIC STUDIES OF DEFECTS IN 6H-SIC SINGLE-CRYSTALS [J].

DUDLEY, M ;

WANG, SP ;

HUANG, W ;

CARTER, CH ;

TSVETKOV, VF ;

FAZI, C .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (4A) :A63-A68

[4] Assessment of orientation and extinction contrast contributions to the direct dislocation image [J].

Dudley, M ;

Huang, XR ;

Huang, W .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (10A) :A139-A144

[5] The mechanism of micropipe nucleation at inclusions in silicon carbide [J].

Dudley, M ;

Huang, XR ;

Huang, W ;

Powell, A ;

Wang, S ;

Neudeck, P ;

Skowronski, M .

APPLIED PHYSICS LETTERS, 1999, 75 (06) :784-786

[6] CAPILLARY EQUILIBRIA OF DISLOCATED CRYSTALS [J].

FRANK, FC .

ACTA CRYSTALLOGRAPHICA, 1951, 4 (06) :497-501

[7] Direct evidence of micropipe-related pure superscrew dislocations in SiC [J].

Huang, XR ;

Dudley, M ;

Vetter, WM ;

Huang, W ;

Wang, S ;

Carter, CH .

APPLIED PHYSICS LETTERS, 1999, 74 (03) :353-355

[8] Contrast mechanism in superscrew dislocation images on synchrotron back-reflection topographs [J].

Huang, XR ;

Dudley, M ;

Vetter, WM ;

Huang, W ;

Wang, S ;

Carter, CH .

APPLICATIONS OF SYNCHROTRON RADIATION TECHNIQUES TO MATERIALS SCIENCE IV, 1998, 524 :71-76

[9] Superscrew dislocation contrast on synchrotron white-beam topographs: an accurate description of the direct dislocation image [J].

Huang, XR ;

Dudley, M ;

Vetter, WM ;

Huang, W ;

Si, W ;

Carter, CH .

JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1999, 32 :516-524

[10]

Neudeck PG, 1998, MATER RES SOC SYMP P, V483, P285

← 1 2 →