Evaluating and controlling silicon wafer slicing quality using fuzzy analytical hierarchy and sensitivity analysis

被引：20

作者：

Chang, Che-Wei ^{[1
]}

Wu, Cheng-Ru ^{[2
]}

Lin, Chin-Tsai ^{[3
]}

Chen, Huang-Chu ^{[3
]}

机构：

[1] Yuanpei Univ, Dept Informat Management, Hsinchu 30015, Taiwan

[2] Yuanpei Univ, Dept Finance, Hsinchu 30015, Taiwan

[3] Yuanpei Univ, Grad Inst Business & Management, Hsinchu 30015, Taiwan

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2008年 / 36卷 / 3-4期

关键词：

wafer slicing; fuzzy analytical hierarchy process; sensitivity analysis; EWMA;

D O I：

10.1007/s00170-006-0831-9

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Twelve-inch wafer slicing is the most challenging process in semiconductor manufacturing yield. This study applies the fuzzy analytic hierarchy process (FAHP) not only to construct the multi-criteria decision problem and determine criteria weights, but also to assess the expected contributions of alternatives to previously defined objectives. Therefore, the fuzzy AHP-based proposed algorithm is applied to select evaluation outcomes and evaluate the precision of optimal performing machines. Additionally, a case study and the exponential weighted moving average (EWMA) control chart are presented to demonstrate and verify the feasibility and effectiveness of the proposed method. Finally, sensitivity analysis is conducted to test the stability of the priority ranking and help online engineers understand multi-criteria decision scenarios that reflect alternative future developments or different perspectives regarding the relative importance of the criteria.

引用

页码：322 / 333

页数：12

共 19 条

[1]

[Anonymous], 1995, ANN BOOK ASTM STAND, DOI DOI 10.1520/2002C

[2] Data mining for improving a cleaning process in the semiconductor industry [J].

Braha, D ;

Shmilovici, A .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 2002, 15 (01) :91-101

[3] FUZZY HIERARCHICAL ANALYSIS [J].

BUCKLEY, JJ .

FUZZY SETS AND SYSTEMS, 1985, 17 (03) :233-247

[4] SEMICONDUCTOR YIELD IMPROVEMENT - RESULTS AND BEST PRACTICES [J].

CUNNINGHAM, SP ;

SPANOS, CJ ;

VOROS, K .

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1995, 8 (02) :103-109

[5]

Hsu T., 2000, Journal of Management and Systems, V7, P19

[6]

HSU TH, 1997, J TRANSPORTATION TAI, V10, P79

[7] Applying fuzzy analytic hierarchy process in the managerial talent assessment model - an empirical study in Taiwan's semiconductor industry [J].

Huang, LC ;

Wu, RYH .

INTERNATIONAL JOURNAL OF TECHNOLOGY MANAGEMENT, 2005, 30 (1-2) :105-130

[8]

KAO I, 1997, NSF DES MAN GRANT C, P239

[9] Relative control philosophy - balance and continual change for forecasting abnormal quality characteristics in a silicon wafer slicing process [J].

Lin, CT ;

Chang, CW ;

Chen, CB .

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2005, 26 (9-10) :1109-1114

[10]

LIN CT, 2004, INT J MANUFACTURING, V2, P171

← 1 2 →