共 32 条
[1]
Bates DR., 1962, Atomic and Molecular Processes
[2]
BOUEF JP, 2003, J PHYS D, V36, pR53
[6]
ENGEL AV, 1965, IONIZED GASES
[8]
HERSHKOWITZ N, 1989, PLASMA DIAGNOSTICS, P141
[9]
PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION USING FORCED FLOW THROUGH HOLLOW CATHODES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (06)
:3176-3182
[10]
Korzec D., 2001, Science and Technology of Advanced Materials, V2, P595, DOI 10.1016/S1468-6996(01)00142-5