Kinetic evolution and equilibrium morphology of strained islands

被引：88

作者：

Rastelli, A

Stoffel, M

Tersoff, J

Kar, GS

Schmidt, OG

机构：

[1] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany

[2] TJ Watson Res Ctr, IBM Res Div, Yorktown Hts, NY 10598 USA

来源：

PHYSICAL REVIEW LETTERS | 2005年 / 95卷 / 02期

关键词：

D O I：

10.1103/PhysRevLett.95.026103

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Self-assembled SiGe islands grown on Si(001) leave behind characteristic "footprints" that reveal that small islands shrink, losing material to nearby larger islands. The critical size, dividing shrinking from growing islands, corresponds to the pyramid-to-dome shape transition, consistent with "anomalous coarsening." While shrinking, {105}-faceted pyramids transform into truncated pyramids and ultimately into unfaceted mounds. The similarity to behavior during island growth indicates that island shape and facet formation are thermodynamically determined.

引用

页数：4

共 24 条

[1] Strain relief via trench formation in Ge/Si(100) islands [J].