共 11 条
[1]
FEENSTRA KF, 1998, P 2 WORLD C PHOT EN, P956
[2]
Microcrystalline silicon prepared by hot-wire chemical vapour deposition for thin film solar cell applications
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
2002, 41 (1AB)
:L10-L12
[3]
MAHAN AH, 2000, MAT RES SOC S P, V609
[4]
Deposition of amorphous and microcrystalline silicon using a graphite filament in the hot wire chemical vapor deposition technique
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2001, 19 (06)
:2817-2819
[5]
Device-quality polycrystalline and amorphous silicon films by hot-wire chemical vapour deposition
[J].
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES,
1997, 76 (03)
:309-321
[7]
SCHROPP REI, 2001, MAT RES SOC S P, V664
[8]
SCHROPP REI, 2002, MAT RES SOC S P, V715