Mechanism of stress relaxation in Ge nanocrystals embedded in SiO2 -: art. no. 063107

被引:53
作者
Sharp, ID [1 ]
Yi, DO
Xu, Q
Liao, CY
Beeman, JW
Liliental-Weber, Z
Yu, KM
Zakharov, DN
Ager, JW
Chrzan, DC
Haller, EE
机构
[1] Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1856132
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ion-beam-synthesized Ge-74 nanocrystals embedded in an amorphous silica matrix exhibit large compressive stresses in the as-grown state. The compressive stress is determined quantitatively by evaluating the Raman line shift referenced to the line position of free-standing nanocrystals. Postgrowth thermal treatments lead to stress reduction. The stress relief process is shown to be governed by the diffusive flux of matrix atoms away from the local nanocrystal growth region. A theoretical model that quantitatively describes this process is presented. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
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