共 58 条
[41]
RIE KT, 1990, METALL, V44, P732
[42]
RIE KT, 1991, J PHYS IV, V1, P397
[43]
RIE KT, SURF COAT TECH, P973
[44]
RIE KT, 1996, 5 INT C PLASM SURF E
[45]
RIE KT, 1987, P 6 EUR C CHEM VAP D, P311
[47]
ROSSNAGEL SM, 1991, ADV SURFACE COATINGS, P14
[49]
UNBALANCED MAGNETRON ION-ASSISTED DEPOSITION AND PROPERTY MODIFICATION OF THIN-FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (03)
:504-508