WO3 thin film sensor prepared by sol-gel technique and its low-temperature sensing properties to trimethylamine

被引：76

作者：

Tong, MS ^{[1
]}

Dai, GR ^{[1
]}

Gao, DS ^{[1
]}

机构：

[1] Jilin Univ, Natl Integrated Optoelect Lab, Dept Elect Engn, Changchun 130023, Peoples R China

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2001年 / 69卷 / 1-3期

基金：

中国国家自然科学基金;

关键词：

gas sensor; sol-gel technique; thin films; trimethylamine; tungsten oxide;

D O I：

10.1016/S0254-0584(00)00389-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Tungsten oxide (WO3) thin film has been prepared on a porcelain tube with gold comb-type electrodes by using a sol-gel technique with WCl6 as precursor. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures higher than 500 degreesC. The sensing characteristics of the thin film sensor to trimethylamine were measured. A low-temperature, high sensitivity, excellent selectivity, quick response and recover of thin film sensors to trimethylamine were found. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：176 / 179

页数：4

共 11 条

[1] TIN DIOXIDE THIN-FILM GAS SENSOR PREPARED BY CHEMICAL-VAPOR-DEPOSITION - INFLUENCE OF GRAIN-SIZE AND THICKNESS ON THE ELECTRICAL-PROPERTIES
BRUNO, L
PIJOLAT, C
LALAUZE, R
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1994, 18 (1-3) : 195 - 199
[2] ENHANCEMENT OF TRIMETHYLAMINE SENSITIVITY OF SEMICONDUCTOR GAS SENSORS BY RUTHENIUM
EGASHIRA, M
SHIMIZU, Y
TAKAO, Y
[J]. CHEMISTRY LETTERS, 1988, (03) : 389 - 392
[3] RELATIONSHIP BETWEEN GAS SENSITIVITY AND FILM STRUCTURE OF SNO2 THIN-FILM GAS SENSOR BY SOL-GEL METHOD
KANAMORI, M
TAKEUCHI, M
OHYA, Y
TAKAHASHI, Y
[J]. CHEMISTRY LETTERS, 1994, (11) : 2035 - 2038
[4] Properties and mechanism study of Ag doped SnO2 thin films as H2S sensors
Liu, CH
Zhang, L
He, YJ
[J]. THIN SOLID FILMS, 1997, 304 (1-2) : 13 - 15
[5] HYDROGEN-SULFIDE SENSOR-BASED ON TIN OXIDE DEPOSITED BY SPRAY-PYROLYSIS AND MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION
MANORAMA, S
DEVI, GS
RAO, VJ
[J]. APPLIED PHYSICS LETTERS, 1994, 64 (23) : 3163 - 3165
[6] MOCHIDA T, 1995, SENSOR ACTUAT B-CHEM, V24, P433
[7] SAITO T., 1959, BULL JAPANESE SOC SCI FISH, V24, P749
[8] REACTIVELY SPUTTERED INDIUM TIN OXIDE POLYCRYSTALLINE THIN-FILMS AS NO AND NO2 GAS SENSORS
SBERVEGLIERI, G
BENUSSI, P
COCCOLI, G
GROPELLI, S
NELLI, P
[J]. THIN SOLID FILMS, 1990, 186 (02) : 349 - 360
[9] NO2 gas sensitivity of sol-gel-derived alpha-Fe2O3 thin films
Sun, HT
Cantalini, C
Faccio, M
Pelino, M
[J]. THIN SOLID FILMS, 1995, 269 (1-2) : 97 - 101
[10] TRIMETHYLAMINE-SENSING MECHANISM OF TIO2-BASED SENSORS .1. EFFECTS OF METAL ADDITIVES ON TRIMETHYLAMINE-SENSING PROPERTIES OF TIO2 SENSORS
TAKAO, Y
IWANAGA, Y
SHIMIZU, Y
EGASHIRA, M
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1993, 10 (03) : 229 - 234

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