gas sensor;
sol-gel technique;
thin films;
trimethylamine;
tungsten oxide;
D O I:
10.1016/S0254-0584(00)00389-8
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Tungsten oxide (WO3) thin film has been prepared on a porcelain tube with gold comb-type electrodes by using a sol-gel technique with WCl6 as precursor. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures higher than 500 degreesC. The sensing characteristics of the thin film sensor to trimethylamine were measured. A low-temperature, high sensitivity, excellent selectivity, quick response and recover of thin film sensors to trimethylamine were found. (C) 2001 Elsevier Science B.V. All rights reserved.