WO3 thin film sensor prepared by sol-gel technique and its low-temperature sensing properties to trimethylamine

被引:76
作者
Tong, MS [1 ]
Dai, GR [1 ]
Gao, DS [1 ]
机构
[1] Jilin Univ, Natl Integrated Optoelect Lab, Dept Elect Engn, Changchun 130023, Peoples R China
基金
中国国家自然科学基金;
关键词
gas sensor; sol-gel technique; thin films; trimethylamine; tungsten oxide;
D O I
10.1016/S0254-0584(00)00389-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Tungsten oxide (WO3) thin film has been prepared on a porcelain tube with gold comb-type electrodes by using a sol-gel technique with WCl6 as precursor. The X-ray diffraction and X-ray photoelectron spectrum results indicate the crystallization of tungsten oxide occurs at temperatures higher than 500 degreesC. The sensing characteristics of the thin film sensor to trimethylamine were measured. A low-temperature, high sensitivity, excellent selectivity, quick response and recover of thin film sensors to trimethylamine were found. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:176 / 179
页数:4
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