Effect of nonthermal plasma reactor for CF4 decomposition

被引：19

作者：

Park, JY ^{[1
]}

Jung, JG

Kim, JS

Rim, GH

Kim, KS

机构：

[1] Kyungnam Univ, Div Elect & Elect Engn, Masan 631701, South Korea

[2] Korean Electrotechnol Res Inst, Masan 641120, South Korea

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2003年 / 31卷 / 06期

关键词：

CF4; decomposition; dielectric-barrier reactor with hole (DBH); metal-particle reactor (MPR); needle-plate reactor (NPR);

D O I：

10.1109/TPS.2003.821581

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

In this paper, the CF4 decomposition efficiency is investigated for three simulated plasma reactors: needle-plate reactor (NPR); metal-particle reactor (MPR); and dielectric-barrier reactor with hole (DBH). The CF4 decomposition efficiency by DBH is much better than that by NPR or MPR. When applied voltage is increased up to the critical voltage for spark formation in the all reactors, the CF4 decomposition efficiency is increased. The CF4 decomposition efficiency in NPR and MPR is about 12% and 22%, respectively, at an applied voltage of 23 kV (consumption power: 110 W) and CF4 concentration of 500 p/min, however, the CF4 decomposition efficiency is higher than 95% in the case of DBH. The DBH should be much better than two reactors investigated for CF4 decomposition.

引用

页码：1349 / 1354

页数：6

共 16 条

[1] Removal of NF3 from semiconductor-process flue gases by tandem packed-bed plasma and adsorbent hybrid systems [J].