Effects of microstructure on the properties of ferroelectric lead zirconate titanate (PZT) thin films

被引:19
作者
Goh, WC
Yao, K
Ong, CK
机构
[1] Inst Mat Res & Engn, Singapore 117602, Singapore
[2] Natl Univ Singapore, Dept Phys, Singapore 117542, Singapore
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2005年 / 81卷 / 05期
关键词
D O I
10.1007/s00339-004-2964-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Lead zirconate titanate (PZT) thin films were prepared with pulsed laser deposition and sol-gel techniques. The PZT films fabricated by these two techniques have similar randomly oriented single perovskite phases, but the film derived from the pulsed laser deposition exhibits a more compact and flat morphology. The dielectric, ferroelectric, and piezoelectric properties of the two kinds of films are comparatively characterized and discussed. It is observed that a denser microstructure would lead to a significantly higher dielectric constant and remanent polarization and a much lower coercive electric field, but only a relatively slight enhancement on the piezoelectric constant. The film with a looser microstructure could have a substantially higher piezoelectric voltage constant g(33) due to the much lower dielectric constant. Our results and discussion provide a better understanding of the relationship between the microstructure and the film properties, which is essential in order to tailor the microstructure and hence determine the performance aiming at a specific application.
引用
收藏
页码:1089 / 1093
页数:5
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