Carbon Nanotube Active-Matrix Backplanes for Conformal Electronics and Sensors

被引:248
作者
Takahashi, Toshitake [1 ,2 ]
Takei, Kuniharu [1 ,2 ]
Gillies, Andrew G.
Fearing, Ronald S. [1 ]
Javey, Ali [1 ,2 ]
机构
[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94702 USA
[2] Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
Carbon nanotube electronics; macroelectronics; artificial electronic skin; stretchable sensors; semiconductor-enriched nanotubes; flexible backplane; FIELD-EFFECT TRANSISTORS; THIN-FILM TRANSISTORS; LARGE-AREA; STRETCHABLE ELECTRONICS; INTEGRATED-CIRCUITS; ARTIFICIAL SKIN; PRESSURE; DISPLAYS; ARRAYS;
D O I
10.1021/nl203117h
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this paper, we report a promising approach for fabricating large-scale flexible and stretchable electronics using a semiconductor-enriched carbon nanotube solution. Uniform semiconducting nanotube networks with superb electrical properties (mobility of similar to 20 cm(2) V-1 s(-1) and I-ON/I-OFF of similar to 10(4)) are obtained on polyimide substrates. The substrate is made stretchable by laser cutting a honeycomb mesh structure, which combined with nanotube-network transistors enables highly robust conformal electronic devices with minimal device-to-device stochastic variations. The utility of this device concept is demonstrated by fabricating an active-matrix backplane (12 x 8 pixels, physical size of 6 x 4 cm(2)) for pressure mapping using a pressure sensitive rubber as the sensor element.
引用
收藏
页码:5408 / 5413
页数:6
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