Dry release of all-polymer structures

被引：36

作者：

Haefliger, D ^{[1
]}

Nordström, M ^{[1
]}

Rasmussen, PA ^{[1
]}

Boisen, A ^{[1
]}

机构：

[1] Tech Univ Denmark, MIC, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

来源：

MICROELECTRONIC ENGINEERING | 2005年 / 78-79卷

关键词：

fluorocarbon film; plasma deposition; release; polymer; SU-8; soft-lithography;

D O I：

10.1016/j.mee.2004.12.013

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a simple dry release technique which uses a thin fluorocarbon film for efficient removal of plastic microdevices from a mould or a handling substrate by reducing the adhesion between the two. This fluorocarbon film is deposited on the substrate in an advanced Si dry etch device utilising the C4F8 passivation plasma. Micromachined polymer chips made of SU-8 are removed from the handling substrate by lifting them off using mechanical tweezers. Effective release of chips of several mm(2) size within a few seconds and the lift-off of fragile, 5.5-mu m-thin cantilevers at a yield of almost 100% were demonstrated on wafer-scale. The fluorocarbon film showed excellent compatibility with metal etch processes and polymer baking and curing steps. It further facilitates demoulding of polydimethylsiloxane stamps suitable for soft-lithography. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：88 / 92

页数：5

共 19 条

[1] Characterization of a time multiplexed inductively coupled plasma etcher [J].

Ayón, AA ;

Braff, R ;

Lin, CC ;

Sawin, HH ;

Schmidt, MA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (01) :339-349

[2]

Ayón AA, 2000, MATER RES SOC SYMP P, V605, P141

[3]

BOSCH R, 1994, Patent No. 4855017

[4]

BOSCH RB, 1994, Patent No. 4784720

[5] Polymeric cantilever arrays for biosensing applications [J].

Calleja, M ;

Tamayo, J ;

Johansson, A ;

Rasmussen, P ;

Lechuga, LM ;

Boisen, A .

SENSOR LETTERS, 2003, 1 (01) :20-24

[6]

CHENG MC, 2003, P MICROTAS, P191

[7] Soft, entirely photoplastic probes for scanning force microscopy [J].

Genolet, G ;

Brugger, J ;

Despont, M ;

Drechsler, U ;

Vettiger, P ;

de Rooij, NF ;

Anselmetti, D .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (05) :2398-2401

[8] Handling of picoliter liquid samples in a poly(dimethylsiloxane)-based microfluidic device [J].

Hosokawa, K ;

Fujii, T ;

Endo, I .

ANALYTICAL CHEMISTRY, 1999, 71 (20) :4781-4785

[9] A self-assembled monolayer-assisted surface microfabrication and release technique [J].

Kim, BJ ;

Liebau, M ;

Huskens, J ;

Reinhoudt, DN ;

Brugger, J .

MICROELECTRONIC ENGINEERING, 2001, 57-8 :755-760

[10] ATOMIC-FORCE MICROSCOPE MEASUREMENTS AND MANIPULATION OF LANGMUIR-BLODGETT-FILMS WITH MODIFIED TIPS [J].

KNAPP, HF ;

WIEGRABE, W ;

HEIM, M ;

ESCHRICH, R ;

GUCKENBERGER, R .

BIOPHYSICAL JOURNAL, 1995, 69 (02) :708-715

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