VUV photoionization time-of-flight mass spectrometry of flash pyrolysis of silane and disilane

被引:27
作者
Chambreau, SD
Zhang, JS [1 ]
机构
[1] Univ Calif Riverside, Dept Chem, Riverside, CA 92521 USA
[2] Univ Calif Riverside, Air Pollut Res Ctr, Riverside, CA 92521 USA
基金
美国国家科学基金会;
关键词
D O I
10.1016/S0009-2614(01)00739-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Flash pyrolysis of silane, SiH4, and disilane, Si2H6, diluted in He or Ar (1%), was carried out at temperatures ranging from similar to 700 to similar to 1500 K. After a short reaction time of similar to 20 mus, the initial products were isolated in a supersonic molecular beam and detected by single vacuum ultra-violet (VUV) photon (lambda = 118 or 121 nm) ionization time-of-flight mass spectrometry (TOFMS). Initial decomposition and reaction products, both free radical intermediates and stable species, were directly observed, which included SiH2 and Si2H4. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:482 / 488
页数:7
相关论文
共 29 条
[1]   UNIMOLECULAR DISSOCIATION DYNAMICS OF DISILANE [J].
AGRAWAL, PM ;
THOMPSON, DL ;
RAFF, LM .
JOURNAL OF CHEMICAL PHYSICS, 1990, 92 (02) :1069-1082
[2]   PHOTOIONIZATION MASS-SPECTROMETRIC STUDIES OF SIHN (N=1-4) [J].
BERKOWITZ, J ;
GREENE, JP ;
CHO, H ;
RUSCIC, B .
JOURNAL OF CHEMICAL PHYSICS, 1987, 86 (03) :1235-1248
[3]   PHOTOIONIZATION MASS AND PHOTOELECTRON-SPECTROSCOPY OF RADICALS, CARBENES, AND BIRADICALS [J].
BLUSH, JA ;
CLAUBERG, H ;
KOHN, DW ;
MINSEK, DW ;
XU, Z ;
CHEN, P .
ACCOUNTS OF CHEMICAL RESEARCH, 1992, 25 (09) :385-392
[4]   MICROREACTOR COUPLED WITH LASER-GENERATED VUV PHOTOIONIZATION FOR PYROLYSIS AND COMBUSTION STUDIES - PYROLYSIS OF ETHYL ACETYLENE [J].
BOYLE, J ;
PFEFFERLE, L ;
LOBUE, J ;
COLSON, S .
COMBUSTION SCIENCE AND TECHNOLOGY, 1990, 70 (4-6) :187-203
[5]   Photoionization of methyl t-butyl ether (MTBE) and t-octyl methyl ether (TOME) and analysis of their pyrolyses by supersonic jet/photoionization mass spectrometry [J].
Chambreau, SD ;
Zhang, JS ;
Traeger, JC ;
Morton, TH .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 2000, 199 (1-3) :17-27
[6]   TOTAL AND PARTIAL ELECTRON COLLISIONAL IONIZATION CROSS-SECTIONS FOR CH4, C2H6, SIH4, AND SI2H6 [J].
CHATHAM, H ;
HILS, D ;
ROBERTSON, R ;
GALLAGHER, A .
JOURNAL OF CHEMICAL PHYSICS, 1984, 81 (04) :1770-1777
[7]   SHOCK-INDUCED KINETICS OF THE DISILANE DECOMPOSITION AND SILYLENE REACTIONS WITH TRIMETHYLSILANE AND BUTADIENE [J].
DZARNOSKI, J ;
RICKBORN, SF ;
ONEAL, HE ;
RING, MA .
ORGANOMETALLICS, 1982, 1 (09) :1217-1220
[8]   POTENTIAL PRIMARY PYROLYSIS PROCESSES FOR DISILANE [J].
GORDON, MS ;
TRUONG, TN ;
BONDERSON, EK .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1986, 108 (07) :1421-1427
[9]   LASER-INDUCED FLUORESCENCE MEASUREMENTS AND KINETIC-ANALYSIS OF SI ATOM FORMATION IN A ROTATING-DISK CHEMICAL-VAPOR-DEPOSITION REACTOR [J].
HO, P ;
COLTRIN, ME ;
BREILAND, WG .
JOURNAL OF PHYSICAL CHEMISTRY, 1994, 98 (40) :10138-10147
[10]   SILICON CHEMICAL VAPOR-DEPOSITION ONE-STEP AT A TIME - FUNDAMENTAL-STUDIES OF SILICON HYDRIDE CHEMISTRY [J].
JASINSKI, JM ;
GATES, SM .
ACCOUNTS OF CHEMICAL RESEARCH, 1991, 24 (01) :9-15