A closed-form approach for frequency tunable comb resonators with curved finger contour

被引：45

作者：

Lee, Ki Bang ^{[1
]}

Lin, Liwei ^{[2
]}

Cho, Young-Ho ^{[3
,4
]}

机构：

[1] KB Lab, Singapore 737937, Singapore

[2] Univ Calif Berkeley, Dept Mech Engn, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

[3] Korea Adv Inst Sci & Technol, BioSyst Dept, Digital Nanolocomot Ctr, Taejon 305701, South Korea

[4] Korea Adv Inst Sci & Technol, Dept Mech Engn, Digital Nanolocomot Ctr, Taejon 305701, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2008年 / 141卷 / 02期

关键词：

tunable resonator; electrostatic force; frequency tuning; stiffness tuning; microresonator; surface micromachining; MEMS;

D O I：

10.1016/j.sna.2007.10.004

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Frequency tunable comb resonators have been successfully designed and demonstrated based on a closed-form approach of a curved comb finger contour. Experimentally, the resonant frequency of a laterally driven comb resonator with 186 pairs of curved finger contour has been reduced by 55% from the initial frequency of 19 kHz under a bias voltage of 150 V The corresponding effective stiffness has been decreased by 80% from the initial value of 2.64 N/m. This closed-form design approach could be extended to microsystems based on electrostatic comb-shape structures such as microaccelerometers, microgyroscopes, and micromechanical filters. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：523 / 529

页数：7

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