Valley-fold and mountain-fold in the micro-origami technique

被引：31

作者：

Vaccaro, PO ^{[1
]}

Kubota, K ^{[1
]}

Fleischmann, T ^{[1
]}

Saravanan, S ^{[1
]}

Aida, T ^{[1
]}

机构：

[1] ATR, Adapt Commun Res Labs, Hikaridai, Kyoto 6190288, Japan

来源：

MICROELECTRONICS JOURNAL | 2003年 / 34卷 / 5-8期

关键词：

micro-origami technique; valley-fold; micro-machined structures;

D O I：

10.1016/S0026-2692(03)00070-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method to make two types of hinges which bend toward opposite directions from the same epitaxial layers using the micro-origami technique is proposed and successfully applied to make standing micro-stages on a GaAs substrate. This method opens a path to fabricate more complex three-dimensional self-positioned micro-machined structures. (C) 2003 Elsevier Science Ltd. All rights reserved.

引用

页码：447 / 449

页数：3

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