High-speed scanning of piezo-probes for nano-fabrication

被引：15

作者：

Croft, D ^{[1
]}

McAllister, D ^{[1
]}

Devasia, S ^{[1
]}

机构：

[1] Univ Utah, Dept Mech Engn, Salt Lake City, UT 84112 USA

来源：

JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME | 1998年 / 120卷 / 03期

关键词：

D O I：

10.1115/1.2830166

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Low scanning speed of piezo-probes has been a fundamental limitation of scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the piezo-probe, to about 1/10th the fundamental vibrational frequency of the piezo-probe. Faster scanning of piezo-probes is achieved here (experimental results are presented) by using inversion of the piezo-dynamics-this approach uses a feedforward input voltage, applied to piezo-probe, to compensate for piezo vibrations.

引用

页码：617 / 622

页数：6

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