Growth mechanism of PbTiO3 films by metal organic chemical vapor deposition from Pb(DPM)2, Ti(DPM)2(i-OPr)2 and O2

被引：2

作者：

Nishioka, K ^{[1
]}

Murayama, S ^{[1
]}

Osawa, T ^{[1
]}

Egashira, Y ^{[1
]}

Komiyama, H ^{[1
]}

机构：

[1] Univ Tokyo, Fac Engn, Dept Chem Syst Engn, Bunkyo Ku, Tokyo 113, Japan

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1998年 / 17卷 / 19期

关键词：

D O I：

10.1023/A:1006650229131

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1653 / 1655

页数：3

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