Water-soluble sacrificial layers for surface micromachining

被引：167

作者：

Linder, V ^{[1
]}

Gates, BD ^{[1
]}

Ryan, D ^{[1
]}

Parviz, BA ^{[1
]}

Whitesides, GM ^{[1
]}

机构：

[1] Harvard Univ, Sch Med, Dept Chem & Chem Biol, Cambridge, MA 02138 USA

来源：

SMALL | 2005年 / 1卷 / 07期

关键词：

microelectromechanical systems; polymers; sacrificial layers; spin coating; surface micromachining;

D O I：

10.1002/smll.200400159

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This manuscript describes the use of water-soluble polymers for use as sacrificial layers in surface micromachining. Water-soluble polymers have two attractive characteristics for this application: 1) They can be deposited conveniently by spin-coating, and the solvent removed at a low temperature (95-150 degrees C), and 2) the resulting layer can be dissolved in water; no corrosive reagents or organic solvents are required. This technique is therefore compatible with a number of fragile materials, such as organic polymers, metal oxides and metals-materials that might be damaged during typical surface micromachining processes. The carboxylic acid groups of one polymer-poly (acrylic acid) (PAA)-can be transformed by reversible ion-exchange from water-soluble (Na+ counterion) to water-insoluble (Ca2+ counterion) forms. The use of PAA and dextran polymers as sacrificial materials is a useful technique for the fabrication of microstructures: Examples include metallic structures formed by the electrodeposition of nickel, and freestanding, polymeric structures formed by photolithography.

引用

页码：730 / 736

页数：7