An Overview of Electrospray Applications in MEMS and Microfluidic Systems

被引：37

作者：

Chiarot, Paul R. ^{[1
]}

Sullivan, Pierre ^{[2
]}

Ben Mrad, Ridha ^{[2
]}

机构：

[1] SUNY Binghamton, Dept Mech Engn, Binghamton, NY 13902 USA

[2] Univ Toronto, Dept Mech & Ind Engn, Toronto, ON M5S3G8, Canada

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 06期

关键词：

Biomedical engineering; electrohydrodynamics; electrospray; microelectromechanical systems (MEMS); MASS-SPECTROMETRY; CAPILLARY-ELECTROPHORESIS; COLLOID THRUSTER; IONIC LIQUIDS; IONIZATION; ARRAY; SILICON; FILMS; FABRICATION; DEPOSITION;

D O I：

10.1109/JMEMS.2011.2168810

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Integrating electrospray into microelectromechanical systems (MEMS) and microfluidic systems supports applications in diverse fields from biotechnology to aerospace. Electrospray also functions as a production tool, allowing for novel methods of MEMS fabrication. This review covers the three most significant applications of electrospray in MEMS and microfluidic systems technology: 1) as an integral part of a microfluidic device, most notably electrospray emitters for coupling a microfluidic chip to a mass spectrometer; 2) as a method for fabricating and manufacturing MEMS; and 3) for micropropulsion in aerospace applications using MEMS-based emitters. Perspectives on future research directions and opportunities are provided.

引用

页码：1241 / 1249

页数：9

共 104 条

[51] Electrohydrodynamic printing of silver nanoparticles by using a focused nanocolloid jet [J].

Lee, Dae-Young ;

Shin, Yun-Soo ;

Park, Sung-Eun ;

Yu, Tae-U ;

Hwang, Jungho .

APPLIED PHYSICS LETTERS, 2007, 90 (08)

[52] Structuring of micro line conductor using electro-hydrodynamic printing of a silver nanoparticle suspension [J].

Lee, DY ;

Hwang, ES ;

Yu, TU ;

Kim, YJ ;

Hwang, J .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2006, 82 (04) :671-674

[53]

LEE MH, 2009, P IEEE INT C NAN MOL, P286

[54] SOI-based nanoelectrospray emitter tips for mass spectrometry: a coupled MEMS and microfluidic design [J].

Legrand, Bernard ;

Ashcroft, Alison E. ;

Buchaillot, Lionel ;

Arscott, Steve .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (03) :509-514

[55] Electrospinning of nanofibers: Reinventing the wheel? [J].

Li, D ;

Xia, YN .

ADVANCED MATERIALS, 2004, 16 (14) :1151-1170

[56] Electrospun nanofibrous structure: A novel scaffold for tissue engineering [J].

Li, WJ ;

Laurencin, CT ;

Caterson, EJ ;

Tuan, RS ;

Ko, FK .

JOURNAL OF BIOMEDICAL MATERIALS RESEARCH, 2002, 60 (04) :613-621

[57] A micromachined chip-based electrospray source for mass spectrometry [J].

Licklider, L ;

Wang, XQ ;

Desai, A ;

Tai, YC ;

Lee, TD .

ANALYTICAL CHEMISTRY, 2000, 72 (02) :367-375

[58] Micro/nano encapsutation via electrified coaxial liquid jets [J].

Loscertales, IG ;

Barrero, A ;

Guerrero, I ;

Cortijo, R ;

Marquez, M ;

Gañán-Calvo, AM .

SCIENCE, 2002, 295 (5560) :1695-1698

[59]

Madou M.J., 2002, Fundamentals of microfabrication, V2nd

[60] Integrated Microfluidic Device for Automated Single Cell Analysis Using Electrophoretic Separation and Electrospray Ionization Mass Spectrometry [J].

Mellors, J. Scott ;

Jorabchi, Kaveh ;

Smith, Lloyd M. ;

Ramsey, J. Michael .

ANALYTICAL CHEMISTRY, 2010, 82 (03) :967-973

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