An Overview of Electrospray Applications in MEMS and Microfluidic Systems

被引：37

作者：

Chiarot, Paul R. ^{[1
]}

Sullivan, Pierre ^{[2
]}

Ben Mrad, Ridha ^{[2
]}

机构：

[1] SUNY Binghamton, Dept Mech Engn, Binghamton, NY 13902 USA

[2] Univ Toronto, Dept Mech & Ind Engn, Toronto, ON M5S3G8, Canada

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 06期

关键词：

Biomedical engineering; electrohydrodynamics; electrospray; microelectromechanical systems (MEMS); MASS-SPECTROMETRY; CAPILLARY-ELECTROPHORESIS; COLLOID THRUSTER; IONIC LIQUIDS; IONIZATION; ARRAY; SILICON; FILMS; FABRICATION; DEPOSITION;

D O I：

10.1109/JMEMS.2011.2168810

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Integrating electrospray into microelectromechanical systems (MEMS) and microfluidic systems supports applications in diverse fields from biotechnology to aerospace. Electrospray also functions as a production tool, allowing for novel methods of MEMS fabrication. This review covers the three most significant applications of electrospray in MEMS and microfluidic systems technology: 1) as an integral part of a microfluidic device, most notably electrospray emitters for coupling a microfluidic chip to a mass spectrometer; 2) as a method for fabricating and manufacturing MEMS; and 3) for micropropulsion in aerospace applications using MEMS-based emitters. Perspectives on future research directions and opportunities are provided.

引用

页码：1241 / 1249

页数：9

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