Free C2F4 jet deposition of thin PTFE-like films

被引：26

作者：

Rebrov, AK ^{[1
]}

Sharafudinov, RS ^{[1
]}

Shishkin, AV ^{[1
]}

Timoshenko, NI ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Thermophys, SB, Novosibirsk 630090, Russia

来源：

PLASMA PROCESSES AND POLYMERS | 2005年 / 2卷 / 06期

关键词：

films; jet; polymerization; polytetrafluoroethylene (PTFE); vacuum;

D O I：

10.1002/ppap.200400081

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This work studied the possibility of thin PTFE-like film deposition, from a supersonic jet of PTFE decomposition products down to the monomer state. One of the most important features of gas-jet deposition is the use of a monomer gas as a precursor with its polymerization on a surface. Under certain conditions, partial polymerization is possible in an adiabatically expanding supersonic jet. Another important feature of this method is the unique possibility of controlling the deposition process by changing parameters of the gas flow and the state of the substrate.

引用

页码：464 / 471

页数：8

共 30 条

[1] Plasma chemistry in fluorocarbon film deposition from pentafluoroethane/argon mixtures [J].

Agraharam, S ;

Hess, DW ;

Kohl, PA ;

Allen, SAB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (06) :3265-3271

[2]

ASHKENAS HZ, 1964, RAREFIED GAS DYN, P84

[3]

Bamford C. H., 1969, COMPREHENSIVE CHEM K, V3

[4]

BARTEL TJ, 2001, AIP C P, V585

[5] Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane (C8F18) vapor I:: Deposition, morphology, structural and chemical properties [J].

Biloiu, C ;

Biloiu, IA ;

Sakai, Y ;

Suda, Y ;

Ohta, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (01) :13-19

[6] DEPOSITION OF AMORPHOUS FLUOROPOLYMERS THIN-FILMS BY LASER ABLATION [J].

BLANCHET, GB .

APPLIED PHYSICS LETTERS, 1993, 62 (05) :479-481

[7]

BONDAR II, 1983, POVERKHN FIZ KHIM ME, V7, P44

[8] Nanostructure and composition control of fluorocarbon films from modulated tetrafluoroethylene plasmas [J].

Cicala, G ;

Milella, A ;

Palumbo, F ;

Rossini, P ;

Favia, P ;

d'Agostino, R .

MACROMOLECULES, 2002, 35 (24) :8920-8922

[9]

CORRELL JH, 1964, PLAST TECHNOL, V10, P45

[10]

d'Agostino R., 1990, PLASMA DEPOSITION TR, P95

← 1 2 3 →