Microcavity plasma devices and arrays: a new realm of plasma physics and photonic applications

被引:61
作者
Eden, JG [1 ]
Park, SJ [1 ]
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Lab Opt Phys & Engn, Urbana, IL 61801 USA
关键词
D O I
10.1088/0741-3335/47/12B/S07
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The confinement of low temperature, non-equilibrium plasmas to cavities having characteristic spatial dimensions < 1 mm is providing new avenues of inquiry for plasma science. Not only is a previously unexplored region of parameter space now accessible, but the interaction of the plasma with its material boundaries raises fascinating questions and opportunities. Other scientific issues that come to the fore include scaling relationships and the collisional processes that become prevalent in a high pressure environment. The general characteristics of microplasmas, as well as several emerging applications, are briefly described here. With regard to the latter, emphasis will be placed on photonics and, specifically, the demonstration of large (500 x 500) arrays of microcavity plasma devices in Si, the observation of photodetection in the visible, near-infrared and ultraviolet by a microplasma, and the measurement of optical gain in the blue (lambda similar to 460 nm) from a linear array of microplasmas in a ceramic structure.
引用
收藏
页码:B83 / B92
页数:10
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