Surface modification of oxide thin film and its gas-sensing properties

被引：26

作者：

Tong, MS ^{[1
]}

Dai, GR ^{[1
]}

Gao, DS ^{[1
]}

机构：

[1] Jilin Univ, Natl Integrated Optoelect Lab, Dept Elect Engn, Changchun 130023, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2001年 / 171卷 / 3-4期

关键词：

thin films; PECVD method; surface modification; gas sensors;

D O I：

10.1016/S0169-4332(00)00708-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The SnO2-F2O3 thin him sensors with added platinum are studied. The gas-sensing materials (Fe2O3 and SnO2) have been prepared from pentacarbonyl iron [Fe(CO)(5)] and tin tetrachloride (SnCl4) by plasma enhanced chemical vapor deposition method. In order to improve pas-sensing properties, the deposited films are dipped into an aqueous solution of H2PtCl6. 6H(2)O and heat-treated to form the Pt modified SnO2-Fe2O3 thin film sensors. The surface composition of the Pt modified thin films has been studied by means of X-ray photoelectron spectrum. The electrical properties of the prepared sensors and the effect of Pt addition on the gas-sensing characteristics have also been investigated. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：226 / 230

页数：5

共 13 条

[1] THIN-FILM TRANSDUCERS AND SENSORS
ANDERSON, JC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 610 - 616
[2] AN INTEGRATED LOW-POWER THIN-FILM CO GAS SENSOR ON SILICON
DEMARNE, V
GRISEL, A
[J]. SENSORS AND ACTUATORS, 1988, 13 (04): : 301 - 313
[3] THE ROLE OF CATALYSIS IN SOLID-STATE GAS SENSORS
GENTRY, SJ
JONES, TA
[J]. SENSORS AND ACTUATORS, 1986, 10 (1-2): : 141 - 163
[4] GUORUI D, 1991, J PHYS IV, V2, P233
[5] Hara K., 1982, P 2 SENS S TSUK JAP, P209
[6] SPILLOVER EFFECTS IN THE DETECTION OF H-2 AND CH4 BY SPUTTERED SNO2 FILMS WITH PD AND PDO DEPOSITS
HUCK, R
BOTTGER, U
KOHL, D
HEILAND, G
[J]. SENSORS AND ACTUATORS, 1989, 17 (3-4): : 355 - 359
[7] EFFECTS OF K-ADATOMS, O-ADATOMS, AND H-ADATOMS ON THE ADSORPTION-KINETICS OF CO ON PT(111)
JIANG, LQ
KOEL, BE
FALCONER, JL
[J]. SURFACE SCIENCE, 1992, 273 (03) : 273 - 284
[8] THE ROLE OF NOBLE-METALS IN THE CHEMISTRY OF SOLID-STATE GAS SENSORS
KOHL, D
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) : 158 - 165
[9] THIN-FILMS FOR GAS SENSORS
LALAUZE, R
BREUIL, P
PIJOLAT, C
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 1991, 3 (03) : 175 - 182
[10] ELECTRICAL STUDIES ON THE REACTIONS OF CO WITH DIFFERENT OXYGEN SPECIES ON SNO2 SURFACES
LANTTO, V
ROMPPAINEN, P
[J]. SURFACE SCIENCE, 1987, 192 (01) : 243 - 264

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