The effects of PbTiO3 thin template layer and Pt/RuO2 hybrid electrode on the ferroelectric properties of sol-gel derived PZT thin film

被引：33

作者：

Kim, SH

Choi, YS

Kim, CE

Yang, DY

机构：

[1] Yonsei Univ, Dept Ceram Engn, Seoul 120749, South Korea

[2] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA

[3] LG Semicon Co Ltd, Adv Technol R&D Lab, Cheongju Si, South Korea

来源：

THIN SOLID FILMS | 1998年 / 325卷 / 1-2期

关键词：

ferroelectric thin film; hybrid electrode; template layer; sol-gel method; PZT; fatigue degradation;

D O I：

10.1016/S0040-6090(98)00486-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Lead zirconate titanate, Pb(Zr0.52Ti0.48)O-3 (PZT) thin film with a thin PbTiO3 template layer was successfully fabricated onto Pt/RuO2 hybrid electrode by using a new alkoxide-alkanolamine sol-gel method, The resulting film showed a well-developed dense grain structure with uniform distribution. It was observed that the use of Pt/RuO2? hybrid electrode helped reduce the amount of the Pb2Ru2O7-x second phase as well as the leakage current by about three orders of magnitude. Typical P-E hysteresis loops were observed even at the low applied voltage of 5 V and the measured values of 2P(s), 2P(r) and 2E(c) were 93 mu C/cm(2), 48 mu C/cm(2) and 78 kV/cm, respectively. Polarization versus fatigue characteristics showed little degradation up to 10(11) cycles. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：72 / 78

页数：7

共 23 条

[1] INFLUENCE OF PLATINUM INTERLAYERS ON THE ELECTRICAL-PROPERTIES OF RUO2/PB(ZR0.53TI0.47)O-3/RUO2 CAPACITOR HETEROSTRUCTURES [J].