High resolution central fringe identification

被引:6
作者
Lee, JY [1 ]
Su, DC [1 ]
机构
[1] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu, Taiwan
关键词
central fringe; heterodyne interferometry;
D O I
10.1016/S0030-4018(98)00430-1
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A high resolution central fringe identification by using the heterodyne interferometry with a tunable laser-diode and a fixed wavelength laser is presented. It can be operated easily and can be used to judge which arm of the Michelson interferometer is longer. The feasibility is demonstrated and it has 0.2 nm resolution. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1 / 4
页数:4
相关论文
共 6 条
[1]   Polychromatic light interferometer for high-accuracy positioning [J].
Dobosz, M ;
Matsumoto, H ;
Seta, K ;
Iwasaki, S .
OPTICS AND LASERS IN ENGINEERING, 1996, 24 (01) :43-56
[2]   Central fringe identification using a heterodyne interferometric technique and a tunable laser-diode [J].
Lee, JY ;
Chiu, MH ;
Su, DC .
OPTICS COMMUNICATIONS, 1996, 128 (4-6) :193-196
[3]   SYNTHESIZED SOURCE FOR WHITE-LIGHT SENSING SYSTEMS [J].
RAO, YJ ;
NING, YN ;
JACKSON, DA .
OPTICS LETTERS, 1993, 18 (06) :462-464
[4]   A multiple white light interferometer [J].
Raz, E .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (10) :3416-3419
[5]   3-WAVELENGTH COMBINATION SOURCE FOR WHITE-LIGHT INTERFEROMETRY [J].
WANG, DN ;
NING, YN ;
GRATTAN, KTV ;
PALMER, AW ;
WEIR, K .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1993, 5 (11) :1350-1352
[6]   A curve fitting signal processing scheme for a white-light interferometric system with a synthetic source [J].
Wang, Q ;
Ning, YN ;
Grattan, KTV ;
Palmer, AW .
OPTICS AND LASER TECHNOLOGY, 1997, 29 (07) :371-376