Micromachining technology for lateral field emission devices

被引:26
作者
Milanovic, V [1 ]
Doherty, L
Teasdale, DA
Parsa, S
Pister, KSJ
机构
[1] La Jolla Microsyst Inst, San Diego, CA 92110 USA
[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
[3] Univ Calif Berkeley, UC Berkeley Microfabricat Lab, Berkeley, CA 94720 USA
关键词
deep reactive ion etch; field emission device; MEMS; micromachining; vacuum microelectronics; vacuum tubes;
D O I
10.1109/16.892185
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a range of novel applications of micromachining and microelectromechanical systems (MEMS) for achieving efficient and tunable field emission devices (FEDs), Arrays of lateral field emission tips are fabricated with submicron spacing utilizing deep reactive ion etch (DRIE), Current densities above 150 A/cm(2) are achieved with over 150 . 10(6) tips/cm(2). With sacrificial sidewall spacing, electrodes can be placed at arbitrarily close distances to reduce turn-on voltages. F-Ve further utilize MEMS actuators to laterally adjust electrode distances. To improve the integration capability of FEDs, we demonstrate batch hump-transfer of working lateral FEDs onto a quartz target substrate.
引用
收藏
页码:166 / 173
页数:8
相关论文
共 18 条
[1]   Characterization of a time multiplexed inductively coupled plasma etcher [J].
Ayón, AA ;
Braff, R ;
Lin, CC ;
Sawin, HH ;
Schmidt, MA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (01) :339-349
[2]   VACUUM MICROELECTRONIC DEVICES [J].
BRODIE, I ;
SCHWOEBEL, PR .
PROCEEDINGS OF THE IEEE, 1994, 82 (07) :1006-1034
[3]   Electron emission in intense electric fields [J].
Fowler, RH ;
Nordheim, L .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-CONTAINING PAPERS OF A MATHEMATICAL AND PHYSICAL CHARACTER, 1928, 119 (781) :173-181
[4]   Fabrication of integrated micromachined electron guns [J].
Hofmann, W ;
Chen, LY ;
MacDonald, NC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2701-2704
[5]  
JOHNSON BR, 1996, P VACC MICR C, P663
[6]   Cold cathode gauges for ultrahigh vacuum measurements [J].
Kendall, BRF ;
Drubetsky, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (03) :740-746
[7]  
Kenny T. W., 1990, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), P192, DOI 10.1109/MEMSYS.1990.110275
[8]  
Larmer F., German Patent, Patent No. [4241045, DE4241045]
[9]   Batch micropackaging by compression-bonded wafer-wafer transfer [J].
Maharbiz, MM ;
Cohn, MB ;
Howe, RT ;
Horowitz, R ;
Pisano, AP .
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :482-489
[10]   A novel in situ vacuum encapsulated lateral field emitter triode [J].
Park, CM ;
Lim, MS ;
Han, MK .
IEEE ELECTRON DEVICE LETTERS, 1997, 18 (11) :538-540