Mechanisms of ablation-rate decrease in multiple-pulse laser ablation

被引:39
作者
Gamaly, EG
Rode, AV [1 ]
Perrone, A
Zocco, A
机构
[1] Australian Natl Univ, Res Sch Phys Sci & Engn, Canberra, ACT 0200, Australia
[2] Univ Lecce, Dept Phys, Inst Nazl Fis Mat, I-73100 Lecce, Italy
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2001年 / 73卷 / 02期
关键词
D O I
10.1007/s003390100876
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present two sets of experimental results on the ablation-rate decrease with increase of the number of consecutive laser pulses hitting the same spot on the target surface. We have studied laser ablation of a carbon target with nanosecond pulses in two different interaction regimes: one with a XeCl laser (lambda = 308 mn) and the other with a Nd:YAG laser (lambda = 1064 nm), in both cases at the intensity similar to 5 x 10(8) W/cm(2) Two different mechanisms were found to be responsible for the ablation-rate decrease; they are directly related to the two different laser-matter interaction regimes. The UV-laser interaction is in the regime of transparent vapour (surface absorption). The increase of the neutral vapour density in the crater produced by the preceding laser pulses is the main reason for the decrease of ablation rate. With the IR laser each single laser pulse interacts with a partially ionised plume. With increase of the number of pulses hitting the same spot on the target surface, the laser-matter interaction regime gradually changes from the near-surface absorption to the volume absorption, resulting in the decrease in absorption in the target and thus in the decrease in the ablation rate. The change in the evaporation rate was considered for both vacuum and reactive-gas environments.
引用
收藏
页码:143 / 149
页数:7
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