Effect of UV irradiation on microlens arrays fabricated by room temperature nanoimprinting using organic spin-on-glass

被引：7

作者：

Nakamatsu, Ken-ichiro ^{[1
]}

Okada, Makoto ^{[1
]}

Minari, Chiaki ^{[1
]}

Takeuchi, Yoshiyuki ^{[2
]}

Taneichi, Noriaki ^{[2
]}

Ohtaka, Shoji ^{[2
]}

Matsui, Shinji ^{[1
]}

机构：

[1] Univ Hyogo, Grad Sch Sci, Lab Adv Sci & Technol Ind, Ako, Hyogo 6781205, Japan

[2] Tokyo Ohka Kogyo Co Ltd, Nakahara Ku, Kawasaki, Kanagawa 2110012, Japan

来源：

APPLIED PHYSICS EXPRESS | 2008年 / 1卷 / 06期

关键词：

D O I：

10.1143/APEX.1.067002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Organic spin-on-glass (O-SOG) has been newly proposed as a replication material used in room-temperature (RT)-nanoimprinting. O-SOG is very suitable for optical applications thanks to its good optical properties, including a high refractive index of 1.56 and a transparency that exceeds 98%. O-SOG microlens arrays were successfully replicated by using RT-nanoimprinting. UV pre-irradiation offered O-SOG-nanoimprinted patterns the property of maintaining their initial profiles after 300 degrees C annealing, while the patterns without any treatment completely disappeared after 300 degrees C annealing due to the polymer reflow. (C) 2008 The Japan Society of Applied Physics.

引用

页码：0670021 / 0670023

页数：3

共 11 条

[1]

Imprint lithography with 25-nanometer resolution [J].

Chou, SY ;

Krauss, PR ;

Renstrom, PJ .

SCIENCE, 1996, 272 (5258) :85-87

[2]

Sub-10 nm imprint lithography and applications [J].

Chou, SY ;

Krauss, PR ;

Zhang, W ;

Guo, LJ ;

Zhuang, L .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06) :2897-2904

[3]

IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J].

CHOU, SY ;

KRAUSS, PR ;

RENSTROM, PJ .

APPLIED PHYSICS LETTERS, 1995, 67 (21) :3114-3116

[4]

HIRAI Y, 2005, J VAC SCI TECHNOL B, V23, P507

[5]

Effect of oxygen plasma irradiation on hydrogen silsesquioxane nanopatterns replicated by room-temperature nanoimprinting [J].

Kawamori, Masanori ;

Nakamatsu, Ken-ichiro ;

Haruyama, Yuichi ;

Matsui, Shinji .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (11) :8994-8996

[6]

Single-step fabrication of refractive microlens arrays [J].

Keyworth, BP ;

Corazza, DJ ;

McMullin, JN ;

Mabbott, L .

APPLIED OPTICS, 1997, 36 (10) :2198-2202

[7]

Room-temperature nanoimprint and nanotransfer printing using hydrogen silsequioxane [J].

Matsui, S ;

Igaku, Y ;

Ishigaki, H ;

Fujita, J ;

Ishida, M ;

Ochiai, Y ;

Namatsu, H ;

Komuro, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (02) :688-692

[8]

Room temperature replication in spin on glass by nanoimprint technology [J].

Matsui, S ;

Igaku, Y ;

Ishigaki, H ;

Fujita, J ;

Ishida, M ;

Ochiai, Y ;

Komuro, M ;

Hiroshima, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06) :2801-2805

[9]

Nanoimprint and nanocontact technologies using hydrogen silsesquioxane [J].

Nakamatsu, K ;

Watanabe, K ;

Tone, K ;

Namatsu, H ;

Matsui, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (02) :507-512

[10]

Bilayer resist method for room-temperature nanoimprint lithography [J].

Nakamatsu, K ;

Watanabe, K ;

Tone, K ;

Katase, T ;

Hattori, W ;

Ochiai, Y ;

Matsuo, T ;

Sasago, M ;

Namatsu, H ;

Komuro, M ;

Matsui, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (6B) :4050-4053

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